JPS6244942A - 回転傾斜試料ホルダ - Google Patents
回転傾斜試料ホルダInfo
- Publication number
- JPS6244942A JPS6244942A JP60185571A JP18557185A JPS6244942A JP S6244942 A JPS6244942 A JP S6244942A JP 60185571 A JP60185571 A JP 60185571A JP 18557185 A JP18557185 A JP 18557185A JP S6244942 A JPS6244942 A JP S6244942A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- bearing
- mounting body
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60185571A JPS6244942A (ja) | 1985-08-23 | 1985-08-23 | 回転傾斜試料ホルダ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60185571A JPS6244942A (ja) | 1985-08-23 | 1985-08-23 | 回転傾斜試料ホルダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6244942A true JPS6244942A (ja) | 1987-02-26 |
JPH0234147B2 JPH0234147B2 (en]) | 1990-08-01 |
Family
ID=16173133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60185571A Granted JPS6244942A (ja) | 1985-08-23 | 1985-08-23 | 回転傾斜試料ホルダ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6244942A (en]) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5089708A (en) * | 1989-10-17 | 1992-02-18 | U.S. Philips Corporation | Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
JP2001066231A (ja) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | 試料作成装置および試料作成方法 |
JP2004333405A (ja) * | 2003-05-12 | 2004-11-25 | Jeol Ltd | 試料保持具及び観察装置並びに試料回転方法 |
JP2007115666A (ja) * | 2005-09-20 | 2007-05-10 | Hironari Miyazaki | 試料ホルダー |
JP2008107226A (ja) * | 2006-10-26 | 2008-05-08 | Jeol Ltd | 試料作成装置 |
JP2015220057A (ja) * | 2014-05-16 | 2015-12-07 | 株式会社メルビル | 試料ホルダー |
EP3038131A1 (en) * | 2014-12-22 | 2016-06-29 | FEI Company | Improved specimen holder for a charged particle microscope |
-
1985
- 1985-08-23 JP JP60185571A patent/JPS6244942A/ja active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5089708A (en) * | 1989-10-17 | 1992-02-18 | U.S. Philips Corporation | Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
JP2001066231A (ja) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | 試料作成装置および試料作成方法 |
JP2004333405A (ja) * | 2003-05-12 | 2004-11-25 | Jeol Ltd | 試料保持具及び観察装置並びに試料回転方法 |
JP2007115666A (ja) * | 2005-09-20 | 2007-05-10 | Hironari Miyazaki | 試料ホルダー |
JP2008107226A (ja) * | 2006-10-26 | 2008-05-08 | Jeol Ltd | 試料作成装置 |
JP2015220057A (ja) * | 2014-05-16 | 2015-12-07 | 株式会社メルビル | 試料ホルダー |
EP3038131A1 (en) * | 2014-12-22 | 2016-06-29 | FEI Company | Improved specimen holder for a charged particle microscope |
US9741527B2 (en) | 2014-12-22 | 2017-08-22 | Fei Company | Specimen holder for a charged particle microscope |
Also Published As
Publication number | Publication date |
---|---|
JPH0234147B2 (en]) | 1990-08-01 |
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